Basic Info.
Transport Package
Cleaning and Final Packaging, Cleaned for Use in V
Specification
Diameter <= 14 inch, Thickness >= 1mm
Product Description
Material Type | Tantalum Pentoxide |
Symbol | Ta2O5 |
Color/Appearance | White, Crystalline Solid |
Melting Point (°C) | 1,872 |
Theoretical Density (g/cc) | 8.2 |
Z Ratio | 0.3 |
Sputter | RF, RF-R |
Max Power Density* (Watts/Square Inch) | 20 |
Type of Bond | Indium, Elastomer |
Comments | Slight decomposition. Evaporate Ta in 10-3 Torr O2. |
Tantalum Oxide Sputtering Targets
Tantalum pentoxide, also known as tantalum(V) oxide, is the inorganic compound with the formula Ta2O5. It is a white solid that is insoluble in all solvents but is attacked by strong bases and hydrofluoric acid. Ta2O5 is an inert material with a high refractive index and low absorption (i.e., colorless), making it useful for coatings. It is also extensively used in the production of capacitors due to its high dielectric constant.
Tantalum Oxide Sputtering Targets Information
Tantalum Oxide Sputtering Targets
Purity: 99.95%;
Circular: Diameter <= 14 inch, Thickness >= 1mm;
Block: Length <= 32 inch, Width <= 12 inch, Thickness >= 1mm.
Bonding is recommended for these materials. Many materials have characteristics that are not amenable to sputtering, such as brittleness and low thermal conductivity. This material may require a special ramp up and ramp down procedures. This process may not be necessary for other materials. Targets that have low thermal conductivity are susceptible to thermal shock.
We also have high-quality pure tantalum sputtering targets for sale with 99.95% purity.
More Information on Tantalum Oxide Sputtering Targets
Applications• Ferroelectric • Gate Dielectric• For CMOS | Features• High purity • Custom sizes available |
Manufacturing Process• Manufacturing - Cold pressed - Sintered, Elastomer bonded to backing plate• Cleaning and final packaging, Cleaned for use in vacuum, Protection from environmental contaminants Protection during shipment | Options• 99.95% minimum purity • Smaller sizes also available for R&D applications • Sputtering target bonding service |
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Business Type:
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Chemicals, Manufacturing & Processing Machinery
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Company Introduction:
Changsha Advanced Engineering Materials Limited (AEM) is an international company involved in the R & D, manufacturing and sales of all kinds of high-tech materials. We provide worldwide research institutes and high-tech enterprises with high purity non-ferrous materials, customized alloys, compounds and almost every kind of complicated synthetic material, etc. We have great advantages in magnetron sputtering targets, vacuum coating materials, high-purity metals, high-purity compounds, rare-earth metals, distilled rare-earth metals, coated substrates, etc.